Control of MEMS Coriolis Vibratory Gyroscopes
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چکیده
This application note gives an overview of different control mechanisms for MEMS Coriolis Vibratory Gyroscopes (CVG) and how they are implemented using the commercial off-the-shelf HF2LI Lock-in Amplifier. A MEMS gyroscope is a micro-machined inertial device that can measure the angle of orientation or the angular rate of rotation. The principle relies on a vibrating structure that is suspended in a way that Coriolis forces can be sensed as the mass undergoes a rotation relative to the inertial space. These Coriolis forces can be efficiently sensed by means of lock-in amplifiers. Additionally, feedback control is usually employed to optimize the vibration properties and improve the overall performance. For highly accurate sensing, the control infrastructure can become complex and a number of control loops are running in parallel.
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